Keyphrases
Ultra-low
100%
Resonator
100%
Integrated Photonics
100%
Wafer-scale
100%
Brillouin Lasing
100%
Energy Efficient
66%
Silicon Nitride
66%
Oxides
33%
Performance Level
33%
Waveguide
33%
Si3N4 Waveguide
33%
Brillouin Laser
33%
Scientific Applications
33%
Scattering Loss
33%
Plasma-enhanced Chemical Vapor Deposition (PECVD)
33%
Photonic Integration
33%
Precision Metrology
33%
200 Mm Wafers
33%
Optical Atomic Clocks
33%
Blanket Layer
33%
Waveguide Design
33%
Intrinsic Linewidth
33%
Threshold Power
33%
Thermal Oxide
33%
Low Pressure Chemical Vapor Deposition (LPCVD)
33%
Efficient Generation
33%
Integration Platform
33%
Tetraethoxysilane
33%
Physics
Waveguide
100%
Resonator
100%
Photonics
100%
Lasing
100%
Vapor Deposition
66%
Linewidth
33%
Silicon Nitride
33%
Atomic Clock
33%
Cladding
33%
Material Science
Waveguide
100%
Silicon Nitride
100%
Resonator
100%
Oxide Compound
66%
Linewidth
33%
Tetraethyl Orthosilicate
33%
Low Pressure Chemical Vapor Deposition
33%
Plasma-Enhanced Chemical Vapor Deposition
33%