@inproceedings{94f1e9d637da4611bc592d12d9bfea46,
title = "Thermal calibration of heated silicon atomic force microscope cantilevers",
abstract = "This paper analyzes the accuracy and stability of calibration methodologies for heated silicon atomic force microscope cantilevers. The calibration techniques include Raman thermometry, comparison of the cantilever electrical characteristics with theory, and isothermal calibration on a hotplate. The various techniques offer tradeoffs between calibration time and calibration accuracy, where the best accuracy possible is with Raman thermometry, which calibrates the heater temperature to within 3-10% of the temperature rise, depending upon the temperature. The temperature calibrations are stable with storage time and cantilever usage, although a 'burn-in' period is usually required to stabilize the cantilever resistance.",
keywords = "Heated atomic force microscopy, Microheater, Nanomanufacturing, Thermal cantilever",
author = "Nelson, {Brent A.} and King, {William P.}",
year = "2007",
doi = "10.1109/SENSOR.2007.4300203",
language = "English (US)",
isbn = "1424408423",
series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "607--610",
booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",
}