The structure and properties of amorphous indium oxide

D. Bruce Buchholz, Qing Ma, Diego Alducin, Arturo Ponce, Miguel Jose-Yacaman, Rabi Khanal, Julia E. Medvedeva, Robert P.H. Chang

Research output: Contribution to journalArticlepeer-review

183 Scopus citations


A series of In2O3 thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-tocrystalline transition and the structure of amorphous In2O3 were investigated by grazing angle X-ray diffraction (GIXRD), Hall transport measurement, high resolution transmission electron microscopy (HRTEM), electron diffraction, extended X-ray absorption fine structure (EXAFS), and ab initio molecular dynamics (MD) liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InOx polyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structure-property relationship.

Original languageEnglish (US)
Pages (from-to)5401-5411
Number of pages11
JournalChemistry of Materials
Issue number18
StatePublished - Sep 23 2014
Externally publishedYes

ASJC Scopus subject areas

  • General Chemistry
  • General Chemical Engineering
  • Materials Chemistry


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