TY - JOUR
T1 - The structure and properties of amorphous indium oxide
AU - Buchholz, D. Bruce
AU - Ma, Qing
AU - Alducin, Diego
AU - Ponce, Arturo
AU - Jose-Yacaman, Miguel
AU - Khanal, Rabi
AU - Medvedeva, Julia E.
AU - Chang, Robert P.H.
N1 - Publisher Copyright:
© 2014 American Chemical Society.
PY - 2014/9/23
Y1 - 2014/9/23
N2 - A series of In2O3 thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-tocrystalline transition and the structure of amorphous In2O3 were investigated by grazing angle X-ray diffraction (GIXRD), Hall transport measurement, high resolution transmission electron microscopy (HRTEM), electron diffraction, extended X-ray absorption fine structure (EXAFS), and ab initio molecular dynamics (MD) liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InOx polyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structure-property relationship.
AB - A series of In2O3 thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-tocrystalline transition and the structure of amorphous In2O3 were investigated by grazing angle X-ray diffraction (GIXRD), Hall transport measurement, high resolution transmission electron microscopy (HRTEM), electron diffraction, extended X-ray absorption fine structure (EXAFS), and ab initio molecular dynamics (MD) liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InOx polyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structure-property relationship.
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U2 - 10.1021/cm502689x
DO - 10.1021/cm502689x
M3 - Article
AN - SCOPUS:84990842364
SN - 0897-4756
VL - 26
SP - 5401
EP - 5411
JO - Chemistry of Materials
JF - Chemistry of Materials
IS - 18
ER -