Temperature calibration of heated silicon atomic force microscope cantilevers

Chemical Compounds

• Thermometry 100%
• Force 46%
• Heat Transfer 37%
• Electrical Property 28%
• Simulation 21%
• Time 12%
• Surface 11%
• Application 10%

Physics & Astronomy

• microscopes 53%
• silicon 37%
• temperature measurement 25%
• temperature 20%
• burn-in 19%
• manufacturing 11%
• methodology 11%
• heat transfer 10%
• electrical properties 10%
• cycles 9%
• heating 8%
• predictions 7%
• simulation 5%

Engineering & Materials Science

• Microscopes 66%
• Silicon 54%
• Calibration 53%
• Temperature 27%
• Electric properties 10%
• Heating 7%
• Heat transfer 6%