Technique for the study of surface roughness of thin films

K. Truszkowska; M. Jose-Yacaman

doi:10.1364/AO.21.004465

Technique for the study of surface roughness of thin films

Research output: Contribution to journal › Article › peer-review

Abstract

A new electron microscopy technique to study topography on thin films is reported. The technique is based on the use of weak diffracted beams. Applications to the characterization of single and polycrystalline films is discussed.

Original language	English (US)
Pages (from-to)	4465-4467
Number of pages	3
Journal	Applied Optics
Volume	21
Issue number	24
DOIs	https://doi.org/10.1364/AO.21.004465
State	Published - Dec 15 1982
Externally published	Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

Access to Document

10.1364/AO.21.004465

Cite this

@article{fcfbe4c5238d4732bc343935826c45eb,

title = "Technique for the study of surface roughness of thin films",

abstract = "A new electron microscopy technique to study topography on thin films is reported. The technique is based on the use of weak diffracted beams. Applications to the characterization of single and polycrystalline films is discussed.",

author = "K. Truszkowska and M. Jose-Yacaman",

year = "1982",

month = dec,

day = "15",

doi = "10.1364/AO.21.004465",

language = "English (US)",

volume = "21",

pages = "4465--4467",

journal = "Applied Optics",

issn = "1559-128X",

publisher = "The Optical Society",

number = "24",

}

TY - JOUR

T1 - Technique for the study of surface roughness of thin films

AU - Truszkowska, K.

AU - Jose-Yacaman, M.

PY - 1982/12/15

Y1 - 1982/12/15

N2 - A new electron microscopy technique to study topography on thin films is reported. The technique is based on the use of weak diffracted beams. Applications to the characterization of single and polycrystalline films is discussed.

AB - A new electron microscopy technique to study topography on thin films is reported. The technique is based on the use of weak diffracted beams. Applications to the characterization of single and polycrystalline films is discussed.

UR - http://www.scopus.com/inward/record.url?scp=0020272254&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020272254&partnerID=8YFLogxK

U2 - 10.1364/AO.21.004465

DO - 10.1364/AO.21.004465

M3 - Article

AN - SCOPUS:0020272254

SN - 1559-128X

VL - 21

SP - 4465

EP - 4467

JO - Applied Optics

JF - Applied Optics

IS - 24

ER -

Technique for the study of surface roughness of thin films

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this