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Shape control in wafer-based aperiodic 3D nanostructures
Hyeon Ho Jeong
, Andrew G. Mark
, John G. Gibbs
, Thomas Reindl
, Ulrike Waizmann
, Jürgen Weis
, Peer Fischer
Research output
:
Contribution to journal
›
Article
›
peer-review
20
Scopus citations
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Keyphrases
3D Nanostructure
100%
Complex Cross-section
33%
Corral
33%
Cross-section Morphology
33%
Electron Beam Lithography
33%
Glancing Angle Deposition
33%
Nanodevices
33%
Nanoscale Objects
33%
Shape Control
100%
Sidewall Morphology
33%
Wafer
100%
Material Science
Lithography
33%
Nanocrystalline Material
100%
Nanodevice
33%