Shape control in wafer-based aperiodic 3D nanostructures

Hyeon Ho Jeong, Andrew G. Mark, John G. Gibbs, Thomas Reindl, Ulrike Waizmann, Jürgen Weis, Peer Fischer

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

Controlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continuous sacrificial corral surrounding the features of interest we grow isolated 3D nanostructures that have complex cross-sections and sidewall morphology that are surrounded by zones of clean substrate.

Original languageEnglish (US)
Article number235302
JournalNanotechnology
Volume25
Issue number23
DOIs
StatePublished - Jun 13 2014
Externally publishedYes

Keywords

  • 3D nanofabrication
  • electron beam lithography
  • glancing angle deposition
  • physical vapour deposition
  • shadow growth

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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