Abstract
Controlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continuous sacrificial corral surrounding the features of interest we grow isolated 3D nanostructures that have complex cross-sections and sidewall morphology that are surrounded by zones of clean substrate.
Original language | English (US) |
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Article number | 235302 |
Journal | Nanotechnology |
Volume | 25 |
Issue number | 23 |
DOIs | |
State | Published - Jun 13 2014 |
Externally published | Yes |
Keywords
- 3D nanofabrication
- electron beam lithography
- glancing angle deposition
- physical vapour deposition
- shadow growth
ASJC Scopus subject areas
- Bioengineering
- General Chemistry
- General Materials Science
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering