Reactive ion etching of gold-nanoparticle-modified pyrolyzed photoresist films

  • Ronen Polsky
  • , Cody M. Washburn
  • , Gabriel Montano
  • , Haiqing Liu
  • , Thayne L. Edwards
  • , De Anna M. Lopez
  • , Jason C. Harper
  • , Susan M. Brozik
  • , David R. Wheeler

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

Under similar electrodeposition conditions the unique surface properties of pyrolyzed photoresist films result in smaller gold nanoparticles with a higher density when compared to other common electrode materials. Reactive ion etching of such surfaces results in the formation of unique AuNP-capped pyramidal carbon structures (see image).

Original languageEnglish (US)
Pages (from-to)2510-2513
Number of pages4
JournalSmall
Volume5
Issue number22
DOIs
StatePublished - Nov 16 2009
Externally publishedYes

Keywords

  • Carbon electrodes
  • Electrodeposition
  • Nanoparticles
  • Reactive ion etching

ASJC Scopus subject areas

  • Biotechnology
  • General Chemistry
  • Biomaterials
  • General Materials Science
  • Engineering (miscellaneous)

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