Reactive ion etching of gold-nanoparticle-modified pyrolyzed photoresist films

Ronen Polsky, Cody M. Washburn, Gabriel Montano, Haiqing Liu, Thayne L. Edwards, De Anna M. Lopez, Jason C. Harper, Susan M. Brozik, David R. Wheeler

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

Under similar electrodeposition conditions the unique surface properties of pyrolyzed photoresist films result in smaller gold nanoparticles with a higher density when compared to other common electrode materials. Reactive ion etching of such surfaces results in the formation of unique AuNP-capped pyramidal carbon structures (see image).

Original languageEnglish (US)
Pages (from-to)2510-2513
Number of pages4
JournalSmall
Volume5
Issue number22
DOIs
StatePublished - Nov 16 2009
Externally publishedYes

Keywords

  • Carbon electrodes
  • Electrodeposition
  • Nanoparticles
  • Reactive ion etching

ASJC Scopus subject areas

  • Biotechnology
  • Biomaterials
  • General Chemistry
  • General Materials Science

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