Properties and applications of derivative signal in sem

Enrique Cabrera; M. José Yacamán

doi:10.1143/JJAP.14.1035

Properties and applications of derivative signal in sem

Research output: Contribution to journal › Article › peer-review

Abstract

The main properties of the derivative signal in a scanning electron microscope are disscussed. Techniques for measuring the resolution and the rate of contamination using it are presented. Finally, other useful applications of derivative signal are pointed out.

Original language	English (US)
Pages (from-to)	1035-1039
Number of pages	5
Journal	Japanese Journal of Applied Physics
Volume	14
Issue number	7
DOIs	https://doi.org/10.1143/JJAP.14.1035
State	Published - Jul 1975
Externally published	Yes

ASJC Scopus subject areas

General Engineering
General Physics and Astronomy

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title = "Properties and applications of derivative signal in sem",

abstract = "The main properties of the derivative signal in a scanning electron microscope are disscussed. Techniques for measuring the resolution and the rate of contamination using it are presented. Finally, other useful applications of derivative signal are pointed out.",

author = "Enrique Cabrera and Yacam{\'a}n, \{M. Jos{\'e}\}",

year = "1975",

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Properties and applications of derivative signal in sem

Abstract

ASJC Scopus subject areas

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