The main properties of the derivative signal in a scanning electron microscope are disscussed. Techniques for measuring the resolution and the rate of contamination using it are presented. Finally, other useful applications of derivative signal are pointed out.
|Original language||English (US)|
|Number of pages||5|
|Journal||Japanese Journal of Applied Physics|
|State||Published - Jul 1975|
ASJC Scopus subject areas
- Physics and Astronomy(all)