Properties and applications of derivative signal in sem

Enrique Cabrera, M. José Yacamán

Research output: Contribution to journalArticlepeer-review


The main properties of the derivative signal in a scanning electron microscope are disscussed. Techniques for measuring the resolution and the rate of contamination using it are presented. Finally, other useful applications of derivative signal are pointed out.

Original languageEnglish (US)
Pages (from-to)1035-1039
Number of pages5
JournalJapanese Journal of Applied Physics
Issue number7
StatePublished - Jul 1975
Externally publishedYes

ASJC Scopus subject areas

  • General Engineering
  • General Physics and Astronomy


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