Keyphrases
Silicon Probe
100%
Local Thermal Analysis
100%
Spatial Resolution
100%
Material Softening
100%
Thermal Analysis
50%
Polystyrene
50%
Heat Flow
25%
Probe Tip
25%
High-throughput Fabrication
25%
Parallelization
25%
Softening Temperature
25%
Atomic Force Microscopy
25%
Ellipsometry
25%
High-throughput Analysis
25%
Sharp Tip
25%
Softening Behavior
25%
Fundamental Limits
25%
Thermal Contact Resistance
25%
Experimental Measure
25%
Engineering
Nanoscale
100%
Spatial Resolution
100%
Fundamental Limit
25%
Atomic Force Microscopy
25%
Measured Temperature
25%
Probe Tip
25%
Thin Films
25%
Softening Behavior
25%
Contact Thermal Resistance
25%
Material Science
Silicon
100%
Thermal Analysis
100%
Polystyrene
40%
Thin Films
20%
Contact Resistance
20%
Film
20%