Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices

J. J. Alcantar-Peña, J. Montes, M. J. Arellano-Jimenez, J. E.Ortega Aguilar, D. Berman-Mendoza, R. García, M. J. Yacaman, O. Auciello

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

Fingerprint

Dive into the research topics of 'Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science