Low-loss D-shape silicon nitride waveguides using a dielectric lift-off fabrication process

Qiancheng Zhao, Jiawei Wang, Nitesh Chauhan, Debapam Bose, Naijun Jin, Renan Moreira, Ryan Behunin, Peter Rakich, Daniel Blumenthal

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science

Chemical Compounds