Low-loss D-shape silicon nitride waveguides using a dielectric lift-off fabrication process

Qiancheng Zhao; Jiawei Wang; Nitesh Chauhan; Debapam Bose; Naijun Jin; Renan Moreira; Ryan Behunin; Peter Rakich; Daniel Blumenthal

doi:10.1364/CLEO_SI.2020.STh1J.3

Low-loss D-shape silicon nitride waveguides using a dielectric lift-off fabrication process

Qiancheng Zhao, Jiawei Wang, Nitesh Chauhan, Debapam Bose, Naijun Jin, Renan Moreira, Ryan Behunin, Peter Rakich, Daniel Blumenthal

Applied Physics and Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

D-shape Si3N4 waveguides are fabricated by dielectric lift-off process. We measure ultra-low loss for a 90nm-thick core of 2.42 dB/m at 1550 nm and a loaded Q-factor of 1.12×10⁶ for a 0.8 mm radius resonator.

Original language	English (US)
Title of host publication	CLEO
Subtitle of host publication	Science and Innovations, CLEO_SI 2020
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781943580767
DOIs	https://doi.org/10.1364/CLEO_SI.2020.STh1J.3
State	Published - 2020
Event	CLEO: Science and Innovations, CLEO_SI 2020 - Washington, United States Duration: May 10 2020 → May 15 2020

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F183-CLEO-SI 2020
ISSN (Electronic)	2162-2701

Conference

Conference	CLEO: Science and Innovations, CLEO_SI 2020
Country/Territory	United States
City	Washington
Period	5/10/20 → 5/15/20

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials

Access to Document

10.1364/CLEO_SI.2020.STh1J.3

Cite this

Zhao, Q., Wang, J., Chauhan, N., Bose, D., Jin, N., Moreira, R., Behunin, R., Rakich, P., & Blumenthal, D. (2020). Low-loss D-shape silicon nitride waveguides using a dielectric lift-off fabrication process. In CLEO: Science and Innovations, CLEO_SI 2020 Article STh1J.3 (Optics InfoBase Conference Papers; Vol. Part F183-CLEO-SI 2020). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/CLEO_SI.2020.STh1J.3

Low-loss D-shape silicon nitride waveguides using a dielectric lift-off fabrication process. / Zhao, Qiancheng; Wang, Jiawei; Chauhan, Nitesh et al.
CLEO: Science and Innovations, CLEO_SI 2020. Optica Publishing Group (formerly OSA), 2020. STh1J.3 (Optics InfoBase Conference Papers; Vol. Part F183-CLEO-SI 2020).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zhao, Q, Wang, J, Chauhan, N, Bose, D, Jin, N, Moreira, R, Behunin, R, Rakich, P & Blumenthal, D 2020, Low-loss D-shape silicon nitride waveguides using a dielectric lift-off fabrication process. in CLEO: Science and Innovations, CLEO_SI 2020., STh1J.3, Optics InfoBase Conference Papers, vol. Part F183-CLEO-SI 2020, Optica Publishing Group (formerly OSA), CLEO: Science and Innovations, CLEO_SI 2020, Washington, United States, 5/10/20. https://doi.org/10.1364/CLEO_SI.2020.STh1J.3

@inproceedings{80a24050feb34317b802ba0e4252ad67,

title = "Low-loss D-shape silicon nitride waveguides using a dielectric lift-off fabrication process",

abstract = "D-shape Si3N4 waveguides are fabricated by dielectric lift-off process. We measure ultra-low loss for a 90nm-thick core of 2.42 dB/m at 1550 nm and a loaded Q-factor of 1.12×106 for a 0.8 mm radius resonator.",

author = "Qiancheng Zhao and Jiawei Wang and Nitesh Chauhan and Debapam Bose and Naijun Jin and Renan Moreira and Ryan Behunin and Peter Rakich and Daniel Blumenthal",

note = "Publisher Copyright: {\textcopyright} OSA 2020 {\textcopyright} 2020 The Author (s); CLEO: Science and Innovations, CLEO_SI 2020 ; Conference date: 10-05-2020 Through 15-05-2020",

year = "2020",

doi = "10.1364/CLEO_SI.2020.STh1J.3",

language = "English (US)",

isbn = "9781943580767",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "CLEO",

}

TY - GEN

T1 - Low-loss D-shape silicon nitride waveguides using a dielectric lift-off fabrication process

AU - Zhao, Qiancheng

AU - Wang, Jiawei

AU - Chauhan, Nitesh

AU - Bose, Debapam

AU - Jin, Naijun

AU - Moreira, Renan

AU - Behunin, Ryan

AU - Rakich, Peter

AU - Blumenthal, Daniel

PY - 2020

Y1 - 2020

N2 - D-shape Si3N4 waveguides are fabricated by dielectric lift-off process. We measure ultra-low loss for a 90nm-thick core of 2.42 dB/m at 1550 nm and a loaded Q-factor of 1.12×106 for a 0.8 mm radius resonator.

AB - D-shape Si3N4 waveguides are fabricated by dielectric lift-off process. We measure ultra-low loss for a 90nm-thick core of 2.42 dB/m at 1550 nm and a loaded Q-factor of 1.12×106 for a 0.8 mm radius resonator.

UR - http://www.scopus.com/inward/record.url?scp=85095449237&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85095449237&partnerID=8YFLogxK

U2 - 10.1364/CLEO_SI.2020.STh1J.3

DO - 10.1364/CLEO_SI.2020.STh1J.3

M3 - Conference contribution

AN - SCOPUS:85095449237

SN - 9781943580767

T3 - Optics InfoBase Conference Papers

BT - CLEO

PB - Optica Publishing Group (formerly OSA)

T2 - CLEO: Science and Innovations, CLEO_SI 2020

Y2 - 10 May 2020 through 15 May 2020

ER -

Low-loss D-shape silicon nitride waveguides using a dielectric lift-off fabrication process

Abstract

Publication series

Conference

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this