TY - GEN
T1 - Low-loss D-shape silicon nitride waveguides using a dielectric lift-off fabrication process
AU - Zhao, Qiancheng
AU - Wang, Jiawei
AU - Chauhan, Nitesh
AU - Bose, Debapam
AU - Jin, Naijun
AU - Moreira, Renan
AU - Behunin, Ryan
AU - Rakich, Peter
AU - Blumenthal, Daniel
N1 - Funding Information:
This work was supported by DARPA MTO APhI contract number FA9453-19-C-0030. The views, opinions and/or findings expressed are those of the author(s) and should not be interpreted as representing the official views or policies of the Department of Defense or the U.S. Government.
Funding Information:
Acknowledgment and funding information: This work was supported by DARPA MTO APhI contract number FA9453-19-C-0030. The views, opinions and/or findings expressed are those of the author(s) and should not be interpreted as representing the official views or policies of the Department of Defense or the U.S. Government.
Publisher Copyright:
© OSA 2020 © 2020 The Author (s)
PY - 2020
Y1 - 2020
N2 - D-shape Si3N4 waveguides are fabricated by dielectric lift-off process. We measure ultra-low loss for a 90nm-thick core of 2.42 dB/m at 1550 nm and a loaded Q-factor of 1.12×106 for a 0.8 mm radius resonator.
AB - D-shape Si3N4 waveguides are fabricated by dielectric lift-off process. We measure ultra-low loss for a 90nm-thick core of 2.42 dB/m at 1550 nm and a loaded Q-factor of 1.12×106 for a 0.8 mm radius resonator.
UR - http://www.scopus.com/inward/record.url?scp=85095449237&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85095449237&partnerID=8YFLogxK
U2 - 10.1364/CLEO_SI.2020.STh1J.3
DO - 10.1364/CLEO_SI.2020.STh1J.3
M3 - Conference contribution
AN - SCOPUS:85095449237
SN - 9781943580767
T3 - Optics InfoBase Conference Papers
BT - CLEO
PB - Optica Publishing Group (formerly OSA)
T2 - CLEO: Science and Innovations, CLEO_SI 2020
Y2 - 10 May 2020 through 15 May 2020
ER -