@inproceedings{80a24050feb34317b802ba0e4252ad67,
title = "Low-loss D-shape silicon nitride waveguides using a dielectric lift-off fabrication process",
abstract = "D-shape Si3N4 waveguides are fabricated by dielectric lift-off process. We measure ultra-low loss for a 90nm-thick core of 2.42 dB/m at 1550 nm and a loaded Q-factor of 1.12×106 for a 0.8 mm radius resonator.",
author = "Qiancheng Zhao and Jiawei Wang and Nitesh Chauhan and Debapam Bose and Naijun Jin and Renan Moreira and Ryan Behunin and Peter Rakich and Daniel Blumenthal",
note = "Funding Information: This work was supported by DARPA MTO APhI contract number FA9453-19-C-0030. The views, opinions and/or findings expressed are those of the author(s) and should not be interpreted as representing the official views or policies of the Department of Defense or the U.S. Government. Funding Information: Acknowledgment and funding information: This work was supported by DARPA MTO APhI contract number FA9453-19-C-0030. The views, opinions and/or findings expressed are those of the author(s) and should not be interpreted as representing the official views or policies of the Department of Defense or the U.S. Government. Publisher Copyright: {\textcopyright} OSA 2020 {\textcopyright} 2020 The Author (s); CLEO: Science and Innovations, CLEO_SI 2020 ; Conference date: 10-05-2020 Through 15-05-2020",
year = "2020",
doi = "10.1364/CLEO_SI.2020.STh1J.3",
language = "English (US)",
series = "Optics InfoBase Conference Papers",
publisher = "OSA - The Optical Society",
booktitle = "CLEO",
address = "United States",
}