Low-Loss D-Shape Silicon Nitride Waveguides using a Dielectric Lift-Off Fabrication Process

Qiancheng Zhao; Jiawei Wang; Nitesh Chauhan; Debapam Bose; Naijun Jin; Renan Moreira; Ryan Behunin; Peter Rakich; Daniel Blumenthal

Low-Loss D-Shape Silicon Nitride Waveguides using a Dielectric Lift-Off Fabrication Process

Qiancheng Zhao, Jiawei Wang, Nitesh Chauhan, Debapam Bose, Naijun Jin, Renan Moreira, Ryan Behunin, Peter Rakich, Daniel Blumenthal

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

D-shape Si₃N₄ waveguides are fabricated by dielectric lift-off process. We measure ultra-low loss for a 90nm-thick core of 2.42 dB/m at 1550 nm and a loaded Q-factor of 1.12×10⁶ for a 0.8 mm radius resonator.

Original language	English (US)
Title of host publication	2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781943580767
State	Published - May 2020
Externally published	Yes
Event	2020 Conference on Lasers and Electro-Optics, CLEO 2020 - San Jose, United States Duration: May 10 2020 → May 15 2020

Publication series

Name	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume	2020-May
ISSN (Print)	1092-8081

Conference

Conference	2020 Conference on Lasers and Electro-Optics, CLEO 2020
Country/Territory	United States
City	San Jose
Period	5/10/20 → 5/15/20

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

Zhao, Q., Wang, J., Chauhan, N., Bose, D., Jin, N., Moreira, R., Behunin, R., Rakich, P., & Blumenthal, D. (2020). Low-Loss D-Shape Silicon Nitride Waveguides using a Dielectric Lift-Off Fabrication Process. In 2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings Article 9193824 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS; Vol. 2020-May). Institute of Electrical and Electronics Engineers Inc..

Low-Loss D-Shape Silicon Nitride Waveguides using a Dielectric Lift-Off Fabrication Process. / Zhao, Qiancheng; Wang, Jiawei; Chauhan, Nitesh et al.
2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2020. 9193824 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS; Vol. 2020-May).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zhao, Q, Wang, J, Chauhan, N, Bose, D, Jin, N, Moreira, R, Behunin, R, Rakich, P & Blumenthal, D 2020, Low-Loss D-Shape Silicon Nitride Waveguides using a Dielectric Lift-Off Fabrication Process. in 2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings., 9193824, Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, vol. 2020-May, Institute of Electrical and Electronics Engineers Inc., 2020 Conference on Lasers and Electro-Optics, CLEO 2020, San Jose, United States, 5/10/20.

Zhao Q, Wang J, Chauhan N, Bose D, Jin N, Moreira R et al. Low-Loss D-Shape Silicon Nitride Waveguides using a Dielectric Lift-Off Fabrication Process. In 2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2020. 9193824. (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS).

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abstract = "D-shape Si3N4 waveguides are fabricated by dielectric lift-off process. We measure ultra-low loss for a 90nm-thick core of 2.42 dB/m at 1550 nm and a loaded Q-factor of 1.12×106 for a 0.8 mm radius resonator.",

author = "Qiancheng Zhao and Jiawei Wang and Nitesh Chauhan and Debapam Bose and Naijun Jin and Renan Moreira and Ryan Behunin and Peter Rakich and Daniel Blumenthal",

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AU - Jin, Naijun

AU - Moreira, Renan

AU - Behunin, Ryan

AU - Rakich, Peter

AU - Blumenthal, Daniel

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AB - D-shape Si3N4 waveguides are fabricated by dielectric lift-off process. We measure ultra-low loss for a 90nm-thick core of 2.42 dB/m at 1550 nm and a loaded Q-factor of 1.12×106 for a 0.8 mm radius resonator.

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ER -

Low-Loss D-Shape Silicon Nitride Waveguides using a Dielectric Lift-Off Fabrication Process

Abstract

Publication series

Conference

ASJC Scopus subject areas

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