Layer disordering and doping compensation of an intersubband AlGaN/AlN superlattice by silicon implantation

J. J. Wierer, A. A. Allerman, E. J. Skogen, A. Tauke-Pedretti, C. Alford, G. A. Vawter, I. Montaño

Research output: Contribution to journal › Article › peer-review