Layer disordering and doping compensation of an intersubband AlGaN/AlN superlattice by silicon implantation

  • J. J. Wierer
  • , A. A. Allerman
  • , E. J. Skogen
  • , A. Tauke-Pedretti
  • , C. Alford
  • , G. A. Vawter
  • , I. Montaño

Research output: Contribution to journal › Article › peer-review

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