Initial results on the development of A new wafer inspection paradigm

Keyphrases

• Declustering 33%
• Defect Tracking 33%
• Fuzzy Clustering 33%
• In-line Process Control 33%
• Inspection Algorithm 33%
• Off-site Analysis 33%
• Simulation Model 33%
• Synthetic Images 33%
• Tracking Mechanism 33%
• Unsupervised Adaptation 33%
• Unsupervised Optimization 33%
• Wafer Inspection 100%
• Wafer Map 66%

Engineering

• Defects 100%
• Process Control 25%
• Simulation Model 25%
• Synthetic Image 25%