Abstract
High-dose ion implantation has been used to synthesize a wide range of nanocrystals and quantum dots and to encapsulate them in host materials such as SiO2, α-Al2O3, and crystalline Si. When Si nanocrystals are encapsulated in SiO2, they exhibit dose dependent absorption and photoluminescence which provides insight into the luminescence mechanism. Compound semiconductor nanocrystals (both group III-V and group II-VI) can be formed in these matrices by sequential implantation of the individual constituents, and we discuss their synthesis and some of their physical and optical properties.
Original language | English (US) |
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Pages (from-to) | 545-552 |
Number of pages | 8 |
Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
Volume | 127-128 |
DOIs | |
State | Published - May 1997 |
Externally published | Yes |
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Instrumentation