TY - GEN
T1 - Embedded piezoresistive microcantilever sensors
T2 - 2006 Materials Research Society Spring Meeting
AU - Porter, Timothy L.
AU - Vail, Tim
AU - Eastman, Michael
AU - Stewart, Ray
AU - Reed, Jim
AU - Delinger, William
PY - 2006
Y1 - 2006
N2 - We have used embedded piezoresistive microcantilever (EPM) sensors in the detection of hydrogen cyanide gas. EPM sensors are small, MEMS-based devices consisting of a tiny piezoresistive microcantilever partially embedded into a "sensing material" designed to respond volumetrically when exposed to the desired analyte. These EPM sensors may be very small, operate on simple and inexpensive support electronics, are highly resistant to movement or shock, may be operated by hardwire connection or wirelessly in large numbers, and are capable of detecting many different analytes. In this study, we have used EPM sensors to detect hydrogen cyanide gas. Preliminary results indicate that the EPM sensors provide a fast response (less than 5 seconds) to levels of HCN that may be lethal to humans.
AB - We have used embedded piezoresistive microcantilever (EPM) sensors in the detection of hydrogen cyanide gas. EPM sensors are small, MEMS-based devices consisting of a tiny piezoresistive microcantilever partially embedded into a "sensing material" designed to respond volumetrically when exposed to the desired analyte. These EPM sensors may be very small, operate on simple and inexpensive support electronics, are highly resistant to movement or shock, may be operated by hardwire connection or wirelessly in large numbers, and are capable of detecting many different analytes. In this study, we have used EPM sensors to detect hydrogen cyanide gas. Preliminary results indicate that the EPM sensors provide a fast response (less than 5 seconds) to levels of HCN that may be lethal to humans.
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U2 - 10.1557/proc-0915-r04-09
DO - 10.1557/proc-0915-r04-09
M3 - Conference contribution
AN - SCOPUS:33749322678
SN - 9781558998711
T3 - Materials Research Society Symposium Proceedings
SP - 149
EP - 153
BT - Nanostructured Materials and Hybrid Composites for Gas Sensors and Biomedical Applications
PB - Materials Research Society
Y2 - 18 April 2006 through 20 April 2006
ER -