Abstract
Anodic aluminum oxide (AAO) may be used as a template for electrochemically fabricating metal and semiconductor nano-wires. We assess the seminal factors involved in each step in this fabrication process with an aim at producing device-quality semiconductor nano-arrays. This includes an analysis of the electrochemical factors, the structural effects resulting from the templating, the crystallinity of the nano-wires, their anisotropy and their suitability for device applications.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 367-376 |
| Number of pages | 10 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 451 |
| State | Published - 1997 |
| Externally published | Yes |
| Event | Proceedings of the 1996 MRS Fall Meeting - Boston, MA, USA Duration: Dec 2 1996 → Dec 5 1996 |
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering