Electrical, thermal, and mechanical characterization of silicon microcantilever heaters

Keyphrases

• Cantilever 100%
• Heater 100%
• Silicon Microcantilever 100%
• Thermoelectric Properties 100%
• Electrical Characterization 100%
• Thermal Characterization 100%
• Mechanical Characterization 100%
• Atomic Force Microscope Cantilever 50%
• Solid State 33%
• Data Storage 33%
• Room Temperature 16%
• Finite Element Analysis 16%
• Temperature Calibration 16%
• Nanofabrication 16%
• Calibration Methodology 16%
• Mechanical Behavior 16%
• Characterization Techniques 16%
• Raman Spectroscopy 16%
• Thermal Calibration 16%
• Surface Stress Measurement 16%
• Thermal Noise 16%
• Noise Spectrum 16%
• Heat Transfer Mechanism 16%
• Local Surface 16%
• Thermophysical Properties Measurements 16%
• Local Temperature Measurements 16%
• Nanoscale Engineering 16%
• Metrology 16%
• Electrical Excitation 16%

Engineering

• Microcantilevers 100%
• Atomic Force Microscope 100%
• Nanoscale 33%
• Room Temperature 33%
• Finite Element Method 33%
• Temperature Calibration 33%
• Time Domain 33%
• Thermal Characterization 33%
• Nanomanufacturing System 33%
• Thermal Noise 33%
• Noise Spectra 33%
• Frequency Domain 33%