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Electrical, thermal, and mechanical characterization of silicon microcantilever heaters

  • Jungchul Lee
  • , Thomas Beechem
  • , Tanya L. Wright
  • , Brent A. Nelson
  • , Samuel Graham
  • , William P. King

Research output: Contribution to journal › Article › peer-review

192   Link opens in a new tab Scopus citations

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Engineering