Dopant characterization of fin field-effect transistor structures using scanning capacitance microscopy

A. A. Khajetoorians, J. Li, C. K. Shih, X. D. Wang, D. Garcia-Gutierrez, M. Jose-Yacaman, D. Pham, H. Celio, A. Diebold

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

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Physics & Astronomy