Design and development of high-frequency thermoacoustic engines for thermal management in microelectronics

O. G. Symko, E. Abdel-Rahman, Y. S. Kwon, M. Emmi, R. Behunin

Research output: Contribution to journalArticlepeer-review

108 Scopus citations


Thermoacoustic heat engines provide a practical solution to the problem of heat management in microcircuits where they can be used to pump heat or produce spot cooling of specific circuit elements. There are basically two types of thermoacoustic engines, a prime mover where heat is converted to acoustic energy, and a heat pump or cooler where sound can pump heat up a temperature gradient. Such devices are relatively simple, they can be efficient, and they are readily adaptable to microcircuit interfacing. Since this type of engines is usually operated in a resonant mode, the operating frequency determines its size. The devices presented here are pumped at frequencies ranging from 4 to 24 kHz. They have been developed for interfacing with microcircuits as heat pumps or spot coolers. Results of their performance are presented and suggestions for further improvements are discussed.

Original languageEnglish (US)
Pages (from-to)185-191
Number of pages7
JournalMicroelectronics Journal
Issue number2
StatePublished - Feb 2004
Externally publishedYes


  • Acoustic heat pump
  • Engine
  • Heat management
  • Miniaturization
  • Thermoacoustic

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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