Comprehensive study of intrinsic unipolar SiOx-based ReRAM characteristics in AC frequency response and low voltage (< 2V) operation

Ying Chen Chen, Yao Feng Chang, Burt Fowler, Fei Zhou, Xiaohan Wu, Cheng Chih Hsieh, Heng Lu Chang, Chih Hung Pan, Min Chen Chen, Kuan Chang Chang, Tsung Ming Tsai, Ting Chang Chang, Jack C. Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Intrinsic unipolar SiOx-based Resistive-RAM (ReRAM) characteristics have been investigated. The cross-bar MIM structures have been examined under AC frequency response, by varying device area, temperature and current states. The results provide additional insights into the hopping/switching mechanisms. For the first time, by using SiOx/HfOx stacking engineering, we have developed a low-voltage operation (< 2V) for SiOx-based ReRAM. The SiOx/HfOx stacking optimization not only maintains the RS behaviors even in air environment without any programming window degradation, but also further reduces the switching voltage below 2V.

Original languageEnglish (US)
Title of host publication2016 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781467394789
DOIs
StatePublished - May 27 2016
Externally publishedYes
EventInternational Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2016 - Hsinchu, Taiwan, Province of China
Duration: Apr 25 2016Apr 27 2016

Publication series

Name2016 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2016

Conference

ConferenceInternational Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2016
Country/TerritoryTaiwan, Province of China
CityHsinchu
Period4/25/164/27/16

Keywords

  • Low Voltage Operation
  • ReRAM
  • SiOx
  • Unipolar

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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