An embedded polymer piezoresistive microcantilever sensor

Timothy L. Porter; Michael P. Eastman; Clay Macomber; William G. Delinger; Rosalie Zhine

doi:10.1016/S0304-3991(03)00062-7

An embedded polymer piezoresistive microcantilever sensor

Timothy L. Porter, Michael P. Eastman, Clay Macomber, William G. Delinger, Rosalie Zhine

Astronomy and Planetary Sciences

Research output: Contribution to journal › Article › peer-review

42 Scopus citations

Abstract

We have developed a new type of chemical microsensor based on piezoresistive microcantilever technology. In this embedded polymer microsensor, a piezoresistive microcantilever is partially "embedded" into a polymeric material. Swelling of the polymer upon analyte exposure is measured as a simple resistance change in the embedded cantilever. Arrays of these sensors, each employing a different polymeric material, provide for the identification of a wide range of chemical vapor analytes. Advantages of this system over previous "surface" piezoresistive microcantilever chemical sensors include enhanced mechanical simplicity (no mechanical approach necessary), greater resistance to shock or movement, and lower cost.

Original language	English (US)
Pages (from-to)	365-369
Number of pages	5
Journal	Ultramicroscopy
Volume	97
Issue number	1-4
DOIs	https://doi.org/10.1016/S0304-3991(03)00062-7
State	Published - 2003

Keywords

Cantilever
Polymer
Sensor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Instrumentation

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10.1016/S0304-3991(03)00062-7

Cite this

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title = "An embedded polymer piezoresistive microcantilever sensor",

abstract = "We have developed a new type of chemical microsensor based on piezoresistive microcantilever technology. In this embedded polymer microsensor, a piezoresistive microcantilever is partially {"}embedded{"} into a polymeric material. Swelling of the polymer upon analyte exposure is measured as a simple resistance change in the embedded cantilever. Arrays of these sensors, each employing a different polymeric material, provide for the identification of a wide range of chemical vapor analytes. Advantages of this system over previous {"}surface{"} piezoresistive microcantilever chemical sensors include enhanced mechanical simplicity (no mechanical approach necessary), greater resistance to shock or movement, and lower cost.",

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T1 - An embedded polymer piezoresistive microcantilever sensor

AU - Porter, Timothy L.

AU - Eastman, Michael P.

AU - Macomber, Clay

AU - Delinger, William G.

AU - Zhine, Rosalie

N1 - Funding Information: The authors gratefully acknowledge the support of the National Science Foundation (DMR-0071672), and the NAU Vice Provost for Research.

PY - 2003

Y1 - 2003

N2 - We have developed a new type of chemical microsensor based on piezoresistive microcantilever technology. In this embedded polymer microsensor, a piezoresistive microcantilever is partially "embedded" into a polymeric material. Swelling of the polymer upon analyte exposure is measured as a simple resistance change in the embedded cantilever. Arrays of these sensors, each employing a different polymeric material, provide for the identification of a wide range of chemical vapor analytes. Advantages of this system over previous "surface" piezoresistive microcantilever chemical sensors include enhanced mechanical simplicity (no mechanical approach necessary), greater resistance to shock or movement, and lower cost.

AB - We have developed a new type of chemical microsensor based on piezoresistive microcantilever technology. In this embedded polymer microsensor, a piezoresistive microcantilever is partially "embedded" into a polymeric material. Swelling of the polymer upon analyte exposure is measured as a simple resistance change in the embedded cantilever. Arrays of these sensors, each employing a different polymeric material, provide for the identification of a wide range of chemical vapor analytes. Advantages of this system over previous "surface" piezoresistive microcantilever chemical sensors include enhanced mechanical simplicity (no mechanical approach necessary), greater resistance to shock or movement, and lower cost.

KW - Cantilever

KW - Polymer

KW - Sensor

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An embedded polymer piezoresistive microcantilever sensor

Abstract

Keywords

ASJC Scopus subject areas

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