A possible tool for fabricating electronic devices through local electrochemistry

D. H.C. Souza, C. R. Da Cunha

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work describes die development of a possible tool for the fabrication of electronic devices mrough nanoengineering of surfaces. The conceived instrument is a scanning probe microscope dedicated for electrochemistry based on low-cost components. The characterization of the instrument was performed with general approach curves and local deposition of materials via the dissociation of a room temperature ionic liquid.

Original languageEnglish (US)
Title of host publicationMicroelectronics Technology and Devices, SBMicro 2010
PublisherElectrochemical Society Inc.
Pages149-154
Number of pages6
Edition1
ISBN (Electronic)9781607681694
ISBN (Print)9781566778190
DOIs
StatePublished - 2010
Externally publishedYes

Publication series

NameECS Transactions
Number1
Volume31
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

ASJC Scopus subject areas

  • General Engineering

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