A new MEMS-based system for ultra-high-resolution imaging at elevated temperatures

  • Lawrence F. Allard
  • , Wilbur C. Bigelow
  • , Miguel Jose-Yacaman
  • , David P. Nackashi
  • , John Damiano
  • , Stephen E. Mick

Research output: Contribution to journalArticlepeer-review

146 Scopus citations

Fingerprint

Dive into the research topics of 'A new MEMS-based system for ultra-high-resolution imaging at elevated temperatures'. Together they form a unique fingerprint.

Keyphrases

Engineering

Physics

Material Science

Chemical Engineering