A new MEMS-based system for ultra-high-resolution imaging at elevated temperatures

Lawrence F. Allard, Wilbur C. Bigelow, Miguel Jose-Yacaman, David P. Nackashi, John Damiano, Stephen E. Mick

Research output: Contribution to journal › Article › peer-review

133 Scopus citations

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Keyphrases

Engineering

Physics

Material Science

Chemical Engineering