TY - JOUR
T1 - 422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth
AU - Puckett, Matthew W.
AU - Liu, Kaikai
AU - Chauhan, Nitesh
AU - Zhao, Qiancheng
AU - Jin, Naijun
AU - Cheng, Haotian
AU - Wu, Jianfeng
AU - Behunin, Ryan O.
AU - Rakich, Peter T.
AU - Nelson, Karl D.
AU - Blumenthal, Daniel J.
N1 - Funding Information:
This material is based upon work supported by the Defense Advanced Research Projects Agency (DARPA) and Space and Naval Warfare Systems Center Pacific (SSC Pacific) under Contract No. N66001-16-C-4017 and the Advanced Research Projects Agency-Energy (ARPA-E), U.S. Department of Energy, under Award Number DE-AR0001042. The views and conclusions contained in this document are those of the authors and should not be interpreted as representing official policies of DARPA, ARPA-E or the U.S. Government. We would like to thank Ron Polcawich and James Adleman for useful discussions. We also thank Jim Nohava, Joe Sexton, Jim Hunter, Dane Larson, Michael DeRubeis, and Jill Lindgren at Honeywell for their contributions to mask design and sample fabrication.
Publisher Copyright:
© 2021, The Author(s).
PY - 2021/12
Y1 - 2021/12
N2 - High quality-factor (Q) optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration in a photonic waveguide platform is key to reducing cost, size, power and sensitivity to environmental disturbances. However, to date, the Q of all-waveguide resonators has been relegated to below 260 Million. Here, we report a Si3N4 resonator with 422 Million intrinsic and 3.4 Billion absorption-limited Qs. The resonator has 453 kHz intrinsic, 906 kHz loaded, and 57 kHz absorption-limited linewidths and the corresponding 0.060 dB m−1 loss is the lowest reported to date for waveguides with deposited oxide upper cladding. These results are achieved through a careful reduction of scattering and absorption losses that we simulate, quantify and correlate to measurements. This advancement in waveguide resonator technology paves the way to all-waveguide Billion Q cavities for applications including nonlinear optics, atomic clocks, quantum photonics and high-capacity fiber communications.
AB - High quality-factor (Q) optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration in a photonic waveguide platform is key to reducing cost, size, power and sensitivity to environmental disturbances. However, to date, the Q of all-waveguide resonators has been relegated to below 260 Million. Here, we report a Si3N4 resonator with 422 Million intrinsic and 3.4 Billion absorption-limited Qs. The resonator has 453 kHz intrinsic, 906 kHz loaded, and 57 kHz absorption-limited linewidths and the corresponding 0.060 dB m−1 loss is the lowest reported to date for waveguides with deposited oxide upper cladding. These results are achieved through a careful reduction of scattering and absorption losses that we simulate, quantify and correlate to measurements. This advancement in waveguide resonator technology paves the way to all-waveguide Billion Q cavities for applications including nonlinear optics, atomic clocks, quantum photonics and high-capacity fiber communications.
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U2 - 10.1038/s41467-021-21205-4
DO - 10.1038/s41467-021-21205-4
M3 - Article
C2 - 33568661
AN - SCOPUS:85101049201
SN - 2041-1723
VL - 12
JO - Nature Communications
JF - Nature Communications
IS - 1
M1 - 934
ER -